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Series 043 | Transfer valve L-MOTION
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产品描述
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Factsheet
Series Number | 43 |
Series Name | Transfer valve L-MOTION |
Description | For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD. |
Actuator types | Pneumatic actuator (double acting) |
Sealing technology | L-MOTION |
Sealing Gate | FKM (VITON®) |
Sealing Bonnet | FKM (VITON®) |
Feedthrough | Bellows |
Leak rate body | < 1·10-9 mbar ls-1 |
Leak rate Seat | < 1·10-9 mbar ls-1 |
Nominal inside diameters (ID) in mm (inch) | 50x336 (1.97"x13.23") - 50x336 (1.97"x13.23") |
Body material | Aluminum |
Cycles until first service | ≥ 3 million cycles |