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Series 043 | Transfer valve L-MOTION
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1
产品描述
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Factsheet
| Series Number | 43 |
| Series Name | Transfer valve L-MOTION |
| Description | For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD. |
| Actuator types | Pneumatic actuator (double acting) |
| Sealing technology | L-MOTION |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak rate body | < 1·10-9 mbar ls-1 |
| Leak rate Seat | < 1·10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inch) | 50x336 (1.97"x13.23") - 50x336 (1.97"x13.23") |
| Body material | Aluminum |
| Cycles until first service | ≥ 3 million cycles |
