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Series 032 | Transfer insert MONOVAT direct
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Series 032 | Transfer insert MONOVAT direct

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Series Number 32
Series Name Transfer insert MONOVAT direct
Description For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.
Actuator types Pneumatic actuator (double acting)
Sealing technology MONOVAT-System
Sealing Gate FKM (VITON®)
Sealing Bonnet FKM (VITON®)
Feedthrough Bellows
Leak rate body < 1`10-9 mbar ls-1
Leak rate Seat < 1`10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch) 32x222 (1.26"x8.75") - 56x496 (2.20"x19.53")
Body material Aluminum; Stainless steel
Cycles until first service ≥ 5 million cycles

 

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