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Series 022 | Transfer valve MONOVAT direct
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产品描述
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Factsheet
| Series Number | 22 |
| Series Name | Transfer valve MONOVAT direct |
| Description | For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. |
| Actuator types | Pneumatic actuator (double acting) |
| Sealing technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak rate body | < 1 . 10-9 mbar ls-1 |
| Leak rate Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inch) | 32x222 (1.26"x8.75") - 56x496 (2.20"x19.53") |
| Body material | Aluminum; Stainless steel |
| Cycles until first service | ≥ 5 million cycles |
