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Series 152 | Low particle UHV Gate valve
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Factsheet
| Series Number | 152 |
| Series Name | Low particle UHV Gate valve |
| Description | 15.0 vacuum / 15.1 HV / 15.2 UHV isolation valve for extremely particle and shock sensitive vacuum systems. |
| Actuator types | Pneumatic actuator (double acting) |
| Sealing technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | Metal |
| Feedthrough | Bellows, UHV |
| Leak rate body | < 5·10-10 mbar ls-1 |
| Leak rate Seat | < 1·10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inch) | 63 (2 1/2") - 200 (8") |
| Body material | Stainless steel |
| Cycles until first service | 500'000 cycles |
