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Series 150 | Low particle gate valve
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Factsheet
Series Number | 150 |
Series Name | Low particle gate valve |
Description | 15.0 vacuum / 15.1 HV / 15.2 UHV isolation valve for extremely particle and shock sensitive vacuum systems. |
Actuator types | , Pneumatic actuator (double acting) |
Sealing technology | MONOVAT-System |
Sealing Gate | FKM (VITON®) |
Sealing Bonnet | FKM (VITON®) |
Feedthrough | , , Shaft feedthrough |
Leak rate body | < 1·10-9 mbar ls-1 |
Leak rate Seat | < 1·10-9 mbar ls-1 |
Body material | Aluminum |
Cycles until first service | 500'000 cycles |