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Series 150 | Low particle gate valve
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产品描述
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Factsheet
| Series Number | 150 |
| Series Name | Low particle gate valve |
| Description | 15.0 vacuum / 15.1 HV / 15.2 UHV isolation valve for extremely particle and shock sensitive vacuum systems. |
| Actuator types | , Pneumatic actuator (double acting) |
| Sealing technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | , , Shaft feedthrough |
| Leak rate body | < 1·10-9 mbar ls-1 |
| Leak rate Seat | < 1·10-9 mbar ls-1 |
| Body material | Aluminum |
| Cycles until first service | 500'000 cycles |
