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Series 078 | Large door L-VAT
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产品描述
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Factsheet
| Series Number | 78 |
| Series Name | Large door L-VAT |
| Description | The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements. |
| Actuator types | Pneumatic actuator (double acting) |
| Sealing technology | L-VAT |
| Sealing Gate | FKM (VITON®) |
| Feedthrough | not applicaple, outside of vacuum |
| Leak rate Seat | < 1·10-7 mbar ls-1 |
| Body material | Aluminum |
| Cycles until first service | ≥ 1 million cycles |
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