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Series 027 | Rectangular gate valve R2R MONOVAT
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Series 027 | Rectangular gate valve R2R MONOVAT

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Series Number 27
Series Name Rectangular gate valve R2R MONOVAT
Description The Roll-to-Roll transfer valve MONOVAT enables tool owners to maintain vacuum isolation between the process and payout and take up chambers to allow for quick and easy exchange of sputter sources and foil/web coils. The MONOVAT Roll-to-Roll transfer valve with double seal MONOVAT technology allows the tool owner to maintain excellent leak rates in high vacuum applications while clamping metal or plastic web substrates without damage.
Actuator types Pneumatic actuator (double acting)
Sealing technology MONOVAT-System
Sealing Gate FKM (VITON®)
Sealing Bonnet FKM (VITON®)
Feedthrough Shaft feedthrough with intermediate pumping
Leak rate body < 1·10-5 mbar ls-1
Leak rate Seat < 1·10-5 mbar ls-1
Nominal inside diameters (ID) in mm (inch) special - special
Body material Aluminum
Cycles until first service 10000 cycles

 

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