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Series 075 | Atmospheric door L-VAT
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产品描述
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Factsheet
| Series Number | 75 |
| Series Name | Atmospheric door L-VAT |
| Description | For load lock and process chamber isolation on the atmospheric side of semiconductor production systems. |
| Actuator types | Pneumatic actuator (double acting) |
| Sealing technology | L-VAT |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | none |
| Feedthrough | Shaft feedthrough |
| Nominal inside diameters (ID) in mm (inch) | special - 50x336 (1.97"x13.23") |
| Body material | Aluminum; Stainless steel |
| Cycles until first service | ≥ 3 million cycles |
