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Series 075 | Atmospheric door L-VAT
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Series 075 | Atmospheric door L-VAT

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Series Number 75
Series Name Atmospheric door L-VAT
Description For load lock and process chamber isolation on the atmospheric side of semiconductor production systems.
Actuator types Pneumatic actuator (double acting)
Sealing technology L-VAT
Sealing Gate FKM (VITON®)
Sealing Bonnet none
Feedthrough Shaft feedthrough
Nominal inside diameters (ID) in mm (inch) special - 50x336 (1.97"x13.23")
Body material Aluminum; Stainless steel
Cycles until first service ≥ 3 million cycles

 

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