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Series 053 | Rectangular insert L-MOTION
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Series 053 | Rectangular insert L-MOTION

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Series Number 53
Series Name Rectangular insert L-MOTION
Description For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.
Actuator types Pneumatic actuator (double acting)
Sealing technology L-MOTION
Sealing Gate FKM (VITON®)
Sealing Bonnet FKM (VITON®)
Feedthrough Bellows
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch) 50x336 (1.97"x13.23") - 50x336 (1.97"x13.23")
Body material Aluminum
Cycles until first service ≥ 3 million cycles

 

 
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